process_name: SiN_300nm
foundry: CORNERSTONE
description: SiN platform with heaters
material: SiN
is_public: true
gds_type: only_real_gds
includes_heaters: true
includes_rf_layers: false
has_a_no_metals_option: true
gds_layers:
  - name: SiN_Etch1_LF_300nm
    layer: [203, 0]
    description: Full SiN etch to BOX (light) for waveguides, layer will be protected. No max feature length @0.35um features.
    drc: 
    - { min_feature_size: 0.25, min_gap: 0.25, max_feature_length: 20.0 }
    - { min_feature_size: 0.35, min_gap: 0.25}
    alias: wg_lf
  - name: SiN_Etch1_DF_300nm
    layer: [204, 0]
    description: Full SiN etch to BOX (dark) for waveguides, layer will be etched. No max feature length @0.35um gaps
    drc: 
    - { min_feature_size: 0.25, min_gap: 0.25, max_feature_length: 20.0 }
    - { min_feature_size: 0.25, min_gap: 0.35}
    alias: wg_df
  - name: Heat_Fil_LF
    layer: [39, 0]
    description: Heater filaments (light), layer will become metal.
    drc: { min_feature_size: 0.6, min_gap: 10.0 }
  - name: Heat_CP_LF
    layer: [41, 0]
    description: Heater contact pads (light), layer will become metal.
    drc: { min_feature_size: 2.0, min_gap: 10.0 }
  - name: Clad_Open_DF
    layer: [22, 0]
    description: Area for oxide etching (dark), layer will be etched. 
    drc: { min_feature_size: 20.0, min_gap: 20.0 }
  - name: Floorplan
    layer: [99, 0]
    is_info_only: true
    description: Cell outline
  - name: Label_Etch_DF
    layer: [100, 0]
    description: Labels (dark), will be etched, will not be checked in DRC
    drc: { min_feature_size: 0.25, min_gap: 0.25 }
layer_stack:
  - name: BOX
    description: BOX - buried oxide
    material: SiO2
    thickness: { value: 3.0 }
    gds_layer: null
  - name: Waveguide
    description: Full thickness SiN layer
    material: SiN
    thickness: { value: 0.3, tol: 0.015 }
    gds_layer: wg_lf or not wg_df
  - name: TOX
    description: Top cladding layer
    material: SiO2
    thickness: { value: 2.0, tol: 0.2 }
    gds_layer: not Clad_Open_DF
  - name: Heater_filament
    description: Heater filament layer (TiN)
    material: metal1
    is_metal_layer: true
    thickness: { value: 0.15, tol: 0.01}
    gds_layer: Heat_Fil_LF
  - name: Contact_pads
    description: Al layer for contact pads and electrical routing
    material: metal2
    is_metal_layer: true
    thickness: { value: 0.22, tol: 0.01}
    gds_layer: Heat_CP_LF
