List of allowed materials#
Name |
Description |
|---|---|
SOI |
Silicon-on-insulator |
SiN |
Silicon nitride |
AlOx |
Aluminium oxide |
AlN |
Aluminium nitride |
GaAs |
Gallium arsenide |
GaN |
Gallium nitride |
Ge-on-Si |
Germanium-on-Silicon, mostly for MIR |
InP |
Indium phospide |
InP-on-SOI |
InP epitaxially grown on SOI insulator |
TFLN |
Thin-film lithium niobate |
BTO |
Barium titanate |